Process · Photonics, MEMS & Sensors
PVT growth (Physical Vapour Transport growth)
The sublimation crystal growth method used for silicon carbide and aluminium nitride, where source powder vaporises in a hot zone and recondenses onto a cooler seed crystal.
- Also known as
- Seeded sublimation growth, Modified Lely method
- Type
- Process
- Domain
- Photonics, MEMS & Sensors, Compound semiconductors
Notes
Competing approaches such as high-temperature CVD and liquid-phase growth aim at higher rate and lower defect density.
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