Material · Lithography & Materials
Polysilicon (Polycrystalline silicon)
High-purity polycrystalline silicon feedstock, made by the Siemens process from trichlorosilane, that is melted to grow single-crystal ingots. Semiconductor grade requires purity around eleven nines.
- Also known as
- Poly-Si feedstock, Semiconductor-grade polysilicon
- Type
- Material
- Domain
- Lithography & Materials, Silicon wafers
Notes
Distinct from the deposited poly-Si used as gate and memory material, and from cheaper solar-grade polysilicon.
Related terms
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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