Acronym · Lithography & Materials
OAI (Off-Axis Illumination)
Shaping the illumination so light strikes the mask at oblique angles rather than normally, which captures more diffraction orders through the lens and improves resolution and depth of focus for periodic patterns.
- Type
- Acronym
- Domain
- Lithography & Materials, Lithography physics
Notes
The gain is pattern-specific, so illumination is co-optimised with the mask rather than chosen generically.
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Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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