Acronym · Fab Ops, Yield & Metrology
EHS (Environment, Health and Safety)
Environment, health and safety (EHS): the function and the rules that protect people and the environment in a workplace. In fabs and equipment makers it covers chemical and gas safety, permits, waste and emissions, and equipment safety evaluations such as SEMI S2.
- Also known as
- Environment, health and safety, HSE
- Type
- Acronym
- Domain
- Fab Ops, Yield & Metrology, Sustainability and resources
Overview
EHS (environment, health and safety) is the function, and the set of rules, that protects people and the environment in a workplace. In fabs and equipment companies it covers hazardous chemicals and gases, permits and inspections, waste water and air emissions, worker exposure, emergency response and the safety evaluation of equipment against guidelines such as SEMI S2.
How it works
Fabs use many hazardous materials: toxic and flammable gases such as silane, arsine and phosphine, corrosive acids, solvents and high-voltage, high-power equipment. EHS teams design layers of protection. Gas cabinets, double-walled lines and leak detectors contain gases; exhaust abatement systems treat emissions; chemical delivery systems limit handling; and interlocks stop tools when something goes wrong. Workers are trained, monitored for exposure where needed, and provided with protective equipment and emergency procedures.
Equipment safety is checked before tools are installed. SEMI S2 is a widely used guideline that sets out environmental, health and safety considerations for semiconductor manufacturing equipment, covering chemical, electrical, mechanical, radiation, fire and ergonomic hazards, and equipment is typically evaluated against it by third parties. Related SEMI guidelines cover topics such as ergonomics and fire risk.
On the environmental side, fabs manage large volumes of water, energy and chemicals. EHS teams handle permits, wastewater treatment, waste disposal and reporting of emissions, including greenhouse gases from process chemicals. Many companies run certified management systems, such as ISO 45001 for occupational health and safety, and the US Occupational Safety and Health Administration publishes guidance on hazards in semiconductor manufacturing.
Examples
- A new deposition tool evaluated against SEMI S2 before it is installed in the fab.
- Gas cabinets with leak detection and automatic shutdown for toxic process gases.
- An exhaust abatement system treating process emissions before release.
- An occupational health and safety management system certified to ISO 45001.
- An emergency drill simulating a chemical spill in the subfab.
Why it matters
A gas release, fire or chemical exposure can injure people, stop a fab and damage a company's licence to operate, so EHS engineers and managers have authority over how tools, chemicals and work are handled. Equipment engineers and facilities teams work with them on every installation and change.
In the chip lifecycle, EHS reviews begin with fab design and permitting, every new tool and chemical is assessed before use, and EHS monitoring and audits continue for the life of the plant.
It matters most to: EHS Engineer (Chemical & Gas Safety), Environmental Compliance Engineer, Fab, Environmental Management System Specialist, Fab EHS Engineer, Fab Equipment Engineer
Common confusions
- Not the same as ESG
- Environmental, social and governance reporting describes a company's sustainability performance to investors. EHS is the operational work of keeping sites safe and compliant.
- Not the same as product compliance
- Product environmental compliance, such as restrictions on hazardous substances in parts, concerns what is in the products sold. EHS concerns the workplace and its emissions.
- Not the same as functional safety
- Functional safety concerns whether products behave safely in use. EHS concerns the safety of people and the environment where products are made.
Related standards
- SEMI S2 (environmental, health and safety guideline for semiconductor manufacturing equipment)
- ISO 45001:2018 (occupational health and safety management systems)
Sources
- SEMI S2: Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (opens in a new tab), SEMI, 2026-10-22
- ISO 45001:2018 Occupational health and safety management systems, Requirements with guidance for use (opens in a new tab), ISO, 2026-10-22
- Semiconductors (overview) (opens in a new tab), US Occupational Safety and Health Administration (OSHA), 2026-10-22
- Environment, health and safety (Wikipedia) (opens in a new tab), Wikimedia Foundation, 2026-10-22
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
Used on 52 pages of the Hub. In each group, the pages that mention it most come first.
Lifecycle stages and gates
Roles
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Tools
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Last reviewed . Written by The Semiconductor Hub editorial team. The full glossary