Component · Memory & Storage
Cell capacitor
The storage element of a DRAM bitcell, today a deep high aspect ratio pillar or trench lined with a high-k dielectric. Designers must hold its capacitance near 6 to 7 femtofarads even as the cell footprint shrinks.
- Also known as
- Storage capacitor
- Type
- Component
- Domain
- Memory & Storage, Volatile memory
Notes
Aspect ratios above 100 to 1 make capacitor etch one of the hardest and most yield-critical steps in DRAM manufacturing.
Related terms
Part of the Memory & Storage glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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