Component · Fab Ops, Yield & Metrology
Cassette
An open slotted wafer carrier used mainly in 150 mm and 200 mm fabs, holding 25 wafers on edge. Unlike a FOUP it does not seal, so the surrounding cleanroom air must itself be very clean.
- Also known as
- Boat, Wafer carrier
- Type
- Component
- Domain
- Fab Ops, Yield & Metrology, Fab operations
Notes
Still ubiquitous in legacy 200 mm fabs serving analogue, power and MEMS production.
Related terms
Part of the Fab Ops, Yield & Metrology glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary