Acronym · Lithography & Materials
AttPSM (Attenuated Phase Shift Mask)
A phase shift mask whose absorber transmits a few percent of the light with a 180 degree phase shift, improving edge contrast for contacts and general patterns.
It is the most widely used PSM variant.
- Also known as
- Embedded PSM, EPSM, Halftone mask
- Type
- Acronym
- Domain
- Lithography & Materials, Photomasks
Notes
Typically built from molybdenum silicide tuned to about six percent transmission.
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