Acronym · Process Technology
ALE (Atomic Layer Etching)
Etching in self-limiting cycles that remove about one atomic layer at a time, using a surface modification step followed by a removal step. It gives the precision and damage control that GAA and high aspect ratio features require.
- Also known as
- Quasi-ALE
- Type
- Acronym
- Domain
- Process Technology, Front-end process
Notes
ALE is the etch counterpart of ALD and has moved from research into production at advanced nodes.
Related terms
- Dry etch
- ALD
- Channel release
- Etch selectivity
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