Thin Film Deposition Process Engineer

Project

Work done for a product or program.

• Develop and release CVD, PECVD, ALD, PVD and electroplating processes for gate dielectrics, spacers, liners, barriers, hardmasks and interconnect metals.
• Control film thickness uniformity, refractive index, composition, density, stress and step coverage against integration specifications.
• Qualify high-k and metal gate stacks including HfO2 ALD, TiN/TaN barriers and work-function metal tuning.
• Develop conformal and gap-fill solutions for high-aspect-ratio structures, eliminating seams, voids and pinch-off.
• Own precursor selection and qualification with suppliers such as Merck, Entegris, Air Liquide and ADEKA, including cost and safety review.
• Reduce particle and film-defect adders through chamber-kit design, seasoning, chamber-clean tuning and PM optimisation.
• Characterise wafer bow and film stress budgets and their overlay and reliability consequences with integration and litho.
• Establish chamber matching, deposition-rate drift monitoring and post-PM qualification criteria across the tool fleet.
• Drive throughput and cost reduction through deposition rate, precursor utilisation and chamber-clean frequency improvement.
• Support excursion containment and root cause for film-related inline and reliability failures.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Maintain process specifications, control plans and work instructions.General
• Work with equipment and material suppliers on performance and quality.General
• Improve cost, cycle time and yield across the operation.General

Project

1. Produce and hand over the role's key deliverables
   • Released deposition recipes and film specifications
   • Film property characterisation package (thickness, stress, composition, conformality)
   • Precursor qualification and second-source reports
   • Particle and defect reduction plan per chamber
   • Chamber matching and PM qualification standards
2. Introduce new productsGeneral
   • Set up and qualify the process
   • Transfer it to production
   • Support the ramp
3. Keep production in controlGeneral
   • Monitor statistical process control charts
   • Contain excursions
   • Close corrective actions

Function

1. Maintain the process baselineGeneral
   • Keep specifications and control plans current
   • Manage changes through change control
2. Improve the operationGeneral
   • Reduce cost and cycle time
   • Work with suppliers on quality