Pellicle and Mask Handling Engineer

Project

Work done for a product or program.

• Own pellicle mount and demount processes for DUV organic pellicles and EUV membrane pellicles, controlling frame flatness, adhesive selection, standoff height and mount-induced registration shift.
• Qualify EUV pellicle transmission, uniformity, thermal survivability at source power and mechanical lifetime, and track transmission degradation over exposure count.
• Monitor particle adders and haze growth on pelliclised and non-pelliclised reticles and trigger cleaning, re-pelliclisation or retirement based on trend data.
• Manage the physical logistics of reticles between mask shop, stocker and scanner, including customs, secure transport, shock and vibration monitoring and chain-of-custody records.
• Investigate reticle contamination and handling excursions, tracing particle sources to pods, robots, stockers, purge gas quality or human handling and driving corrective action.
• Own reticle inventory and life-cycle management including exposure counters, requalification triggers, spare-reticle strategy for high-runner layers and controlled scrapping.
• Qualify new pellicle materials, pod designs and reticle handling automation with the litho and mask teams before production deployment.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Specify and manage reticle pods and carriers including EUV dual pods, inner pods, SMIF reticle pods and standard reticle boxes, and own pod cleaning and requalification cycles.
• Define and audit reticle handling procedures across robotic load ports, reticle stockers, stage chucks and manual handling, including ESD control and electrostatic chuck cleanliness.
• Maintain compliance with SEMI reticle standards for pod interfaces, handling and cleanliness, and drive supplier conformance for pods, frames and pellicle materials.

Project

1. Produce and hand over the role's key deliverables
   • Pellicle mount process specification and qualification data per mask and pellicle type
   • EUV pellicle transmission and lifetime monitoring reports
   • Reticle handling procedures, pod cleaning schedules and audit records
   • Particle adder and haze trend dashboards per reticle and per stocker
   • Reticle life-cycle and inventory management records including retirement decisions
   • Contamination excursion investigations with corrective and preventive actions
2. Introduce new productsGeneral
   • Set up and qualify the process
   • Transfer it to production
   • Support the ramp
3. Keep production in controlGeneral
   • Monitor statistical process control charts
   • Contain excursions
   • Close corrective actions

Function

1. Maintain the process baselineGeneral
   • Keep specifications and control plans current
   • Manage changes through change control
2. Improve the operationGeneral
   • Reduce cost and cycle time
   • Work with suppliers on quality