Facilities & Cleanroom Infrastructure Manager

Project

Work done for a product or program.

• Operate and maintain cleanroom environmental control to ISO 14644 Class 3–5 including FFU and recirculation air systems, pressure cascades, and AMC molecular filtration.
• Manage central utility building systems: chilled water, process cooling water, ultrapure water plant, house vacuum, compressed dry air, and nitrogen and bulk specialty gas distribution.
• Maintain temperature and humidity control within plus or minus 0.1 degrees Celsius and tight RH bands required by immersion and EUV lithography bays.
• Plan and execute tool hookup infrastructure for new equipment installs, coordinating with Equipment Engineering on utility matrices and hookup schedules.
• Manage electrical reliability including UPS, generator backup, power quality, and voltage sag ride-through to prevent unplanned tool downs and wafer scrap.
• Run preventive and predictive maintenance programmes on facilities assets, tracking mean time between failures on critical systems.
• Coordinate abatement, exhaust, scrubber, and wastewater treatment system operation with EHS to hold permit limits and protect the cleanroom.
• Lead facilities response during excursions and shutdown/startup events, minimising recovery time and wafer at risk.
• Drive utility efficiency and water reclaim programmes, reporting energy, water, and greenhouse gas intensity to Sustainability.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Own vibration and electromagnetic interference control for litho and metrology tool locations, including sub-fab isolation and VC-E criteria compliance.

Project

1. Produce and hand over the role's key deliverables
   • Cleanroom environmental performance and particle monitoring reports
   • Utility system reliability and maintenance plans
   • Tool hookup utility matrices and install readiness packages
   • Facilities excursion root-cause and recovery reports
   • Capital facilities upgrade proposals and shutdown plans
   • Water reclaim and energy efficiency programme results
2. Introduce new productsGeneral
   • Set up and qualify the process
   • Transfer it to production
   • Support the ramp
3. Keep production in controlGeneral
   • Monitor statistical process control charts
   • Contain excursions
   • Close corrective actions

Function

1. Maintain the process baselineGeneral
   • Keep specifications and control plans current
   • Manage changes through change control
2. Improve the operationGeneral
   • Reduce cost and cycle time
   • Work with suppliers on quality