Equipment Mechanical Design Engineer

Project

Work done for a product or program.

• Design vacuum chambers, lids, pedestals, showerheads, slit valves and load locks in Creo, NX or SolidWorks with full GD&T dimensioning.
• Run structural, thermal and modal finite-element analyses in ANSYS or Abaqus to verify deflection, stress, seismic and vibration requirements.
• Select and specify elastomer and metal seals, bellows, heaters, ceramics and coatings compatible with fluorine, chlorine and halogen chemistries.
• Own tolerance stack-ups for wafer placement accuracy, chuck flatness and centring across thermal cycles from ambient to 650 C.
• Design for particle performance, choosing surface finishes, anodisation and yttria coatings and eliminating rubbing, wear and line-of-sight paths to the wafer.
• Drive design-for-manufacture and design-for-serviceability reviews with supply chain, machine shops and field service so that parts can be swapped in a PM window.
• Release engineering drawings, BOMs and change orders through the PLM system (Windchill, Teamcenter or Agile) and manage ECO flow-down to suppliers.
• Build and debug prototype hardware on the lab floor, instrumenting it with thermocouples, accelerometers and RGA to validate models.
• Support first-article inspection, supplier qualification and yield of machined and welded assemblies at contract manufacturers.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Ensure compliance with SEMI S2, S8 and F47 and with CE and pressure-vessel requirements for the mechanical envelope.

Project

1. Produce and hand over the role's key deliverables
   • Released 3D models, detail drawings and assembly BOMs for the module
   • FEA structural and thermal analysis reports
   • Tolerance stack-up and wafer-placement-accuracy analysis
   • Design verification test plan and prototype build report
   • Seal, material and coating compatibility specification
   • Serviceability and PM-access design review package
2. Design the blockGeneral
   • Write or capture the design to the specification
   • Run lint, simulation or circuit checks
   • Close design reviews and their actions
3. Support integration and sign-offGeneral
   • Fix bugs found by verification
   • Support timing and physical closure
   • Deliver handoff files and documentation

Function

1. Keep design methods currentGeneral
   • Maintain coding and design standards
   • Build and maintain reusable blocks
2. Develop peopleGeneral
   • Mentor newer engineers
   • Run design reviews and knowledge sharing sessions