Epitaxy Process Engineer

Project

Work done for a product or program.

• Develop and release selective epitaxial growth processes for raised source/drain SiGe:B, Si:P and nanosheet channel and sacrificial stacks.
• Control epi thickness, composition, in-situ doping, strain and facet shape to hit device Rc and mobility targets.
• Characterise and minimise crystal defects including stacking faults, dislocations, twins, pattern loading and mushroom growth.
• Optimise pre-epi surface preparation and bake conditions in coordination with wet clean to guarantee nucleation quality.
• Qualify and maintain epi reactors including susceptor condition, chamber coating, HCl etch-back and in-situ clean cycles.
• Own strain engineering deliverables with device and integration engineers, using XRD, Raman and HRTEM feedback.
• Support compound semiconductor epitaxy for SiC and GaN power or RF devices where applicable, including buffer and drift-layer design.
• Manage pattern-loading and layout-density dependence of growth rate and feed design rules back to enablement teams.
• Establish SPC and metrology sampling for thickness, composition, dopant level and defect density.
• Handle safety-critical silane, dichlorosilane, germane and phosphine delivery and abatement requirements with facilities and EHS.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Maintain process specifications, control plans and work instructions.General
• Work with equipment and material suppliers on performance and quality.General
• Improve cost, cycle time and yield across the operation.General

Project

1. Produce and hand over the role's key deliverables
   • Released epitaxy recipes and layer specifications
   • Strain, composition and defect density characterisation reports
   • Pre-epi clean and bake integration specification
   • Reactor qualification and chamber-clean protocols
   • Pattern loading and density design guidance
2. Introduce new productsGeneral
   • Set up and qualify the process
   • Transfer it to production
   • Support the ramp
3. Keep production in controlGeneral
   • Monitor statistical process control charts
   • Contain excursions
   • Close corrective actions

Function

1. Maintain the process baselineGeneral
   • Keep specifications and control plans current
   • Manage changes through change control
2. Improve the operationGeneral
   • Reduce cost and cycle time
   • Work with suppliers on quality