Advanced Process Control Engineer

Project

Work done for a product or program.

• Design and deploy run-to-run controllers (EWMA, model-predictive, feedforward) for CD, overlay, thickness, removal rate and implant dose.
• Tune controller gains, deadbands, safety limits and threading logic by product, layer, tool and chamber context.
• Build and maintain the fab SPC system: chart selection, subgrouping, control limits, capability indices and alarm rules.
• Define out-of-control action plans with module owners so every alarm has a documented, testable response.
• Reduce false alarms and alarm fatigue through statistically sound limit setting and multivariate chart design.
• Deploy fault detection and classification and multivariate analysis on tool trace data to detect chamber drift early.
• Develop virtual metrology models that predict measurements from tool sensor data and cut metrology load.
• Perform capability studies (Cp, Cpk, Ppk) and gauge R&R studies to certify processes and measurement systems.

Function

Work that keeps the discipline running: methods, tools, suppliers and people.

• Audit control plan coverage against the process flow so no critical parameter is uncontrolled.
• Train module engineers and technicians on statistical thinking, chart interpretation and control-plan discipline.

Project

1. Produce and hand over the role's key deliverables
   • Deployed APC controller configurations and tuning documentation
   • Fab control plan with charts, limits and OCAPs per step
   • Process capability and gauge study reports
   • Virtual metrology and FDC model library
   • Alarm performance and false-alarm reduction review
2. Introduce new productsGeneral
   • Set up and qualify the process
   • Transfer it to production
   • Support the ramp
3. Keep production in controlGeneral
   • Monitor statistical process control charts
   • Contain excursions
   • Close corrective actions

Function

1. Maintain the process baselineGeneral
   • Keep specifications and control plans current
   • Manage changes through change control
2. Improve the operationGeneral
   • Reduce cost and cycle time
   • Work with suppliers on quality