Specialty and bulk gases
A fluorine-source gas used mainly to clean deposition chambers between runs, and in some etch steps. It is a potent greenhouse gas, so gas that leaves the chamber unreacted is abated before release.
Hazardous. Read the supplier's safety data sheet and the authority's guidance before any contact with this material.
The Hub holds no safety data sheet, handling instruction or exposure limit for any material. Use the supplier's own safety data sheet and the guidance of the relevant authority.
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