The design of the hardware kit used to upgrade or modify installed tools: parts, drawings, installation method and compatibility with existing configurations.
Design data Work product in the Semiconductor equipment lifecycle
It lets an upgrade be installed safely and consistently in the field without redesigning the work for each tool. Field upgrades otherwise become custom projects, compatibility problems appear on site and the installed base drifts into many undocumented configurations.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.