The released layout of the MEMS transducer die, including the device, test and process control structures, alignment marks and scribe features, used to make the mask set.
Design data Work product in the MEMS and sensors lifecycle
It is the controlled design data from which MEMS masks are made. Missing layers, broken rules or the wrong variant made waste the first wafer run.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.