The specification of the selected MEMS transducer: geometry, materials, mechanical and electrical parameters, operating conditions and the targets each must meet.
Specification Work product in the MEMS and sensors lifecycle
It defines the transducer precisely enough to lay out, model and verify. Layout and models drift apart when it is loose, and robustness targets such as shock and stiction stay implicit until parts fail.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.