The procedure for bringing a new or serviced tool into match with a reference tool or fleet standard, covering calibration, test wafers, measurements and adjustments.
Guide or manual Work product in the Semiconductor equipment lifecycle
Fabs need tools that give the same result so wafers can be routed to any of them. This procedure makes matching repeatable by anyone trained on it; without it, matching depends on a few expert engineers and tools drift apart after installation and service.
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