The guide that tells a customer what their fab must provide before the tool arrives: space, floor loading, utilities, exhaust, gases, chemicals, environment and access route.
Guide or manual Work product in the Semiconductor equipment lifecycle
It lets the customer prepare the facility in time for installation, so tools do not arrive at sites that cannot take them, hook-ups are planned rather than improvised, installation keeps to schedule and the tool runs in an environment that suits it.
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