The first processed MEMS wafers made with the released mask set and process baseline, carrying transducers and test structures for assembly and probe.
Physical item Work product in the MEMS and sensors lifecycle
They are the first physical transducers and the first test of the process and design together. Tracked lot data, splits and monitor results are what link prototype behaviour to process conditions and find the process window.
The full lifecycle detail, with its charts, flows, tables and every section, is for registered members. Registration is free and takes a minute. You come back to this page afterwards.