The set of photomasks, one per patterned layer, made from the transducer layout database and used to process MEMS wafers.
Physical item Work product in the MEMS and sensors lifecycle
It is the physical tooling that transfers the transducer design onto wafers. An uncontrolled mask set lets a wrong layer version or a defect reach the wafers, and the first MEMS wafers are lost or give misleading results.
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