1. Purpose of the gate
Process Module Development brings each unit process, such as patterning, etch, deposition, implant, thermal steps, planarisation and cleans, to the point where it does what the technology definition needs, on the tools and materials chosen for the node. Process modules capable asks whether that point has been reached for every critical module, and whether the modules are ready to be joined into one flow.
Module capability is judged in isolation, on blanket wafers, short loops and simple test structures. That is deliberate: integration problems are easier to diagnose when each module is known to be capable on its own. The gate therefore checks both the capability evidence and the hand-over: released module process specifications that integration can build a flow from, a patterning solution for each critical layer, and a test vehicle plan for the lots that follow.
The gate criteria are module capability reports showing every critical module meets its targets or has an approved plan, module process specifications released for integration, and the tool set and materials installed and characterised for development.
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