1. Purpose of the gate
Prototype internal acceptance is the maker's own judgement that the tool works. Until now, subsystems have been shown on test stands and software on hardware models. Here the whole tool has been built, integrated and run in the demonstration lab, and the question is whether it does what the requirements say, well enough and safely enough that a lead customer's process engineers would learn something useful from evaluating it.
The review covers four areas. Function: does every subsystem and sequence work in the integrated tool? Process: are the key process requirements shown on test wafers? Safety: is there any open hazard that would stop shipment, and is the SEMI S2 and SEMI S8 evaluation under way, with an independent evaluator where customers expect one? Reliability: has the tool run long enough to reveal its early failure modes?
The gate criteria are a prototype test report in which requirements are tested and gaps recorded with owners; demonstration lab process results showing key process requirements on test wafers; a safety and compliance assessment with no open hazard that would stop shipment; requirements traceability updated with test evidence; and the SEMI S2 and SEMI S8 safety evaluation under way. No key decision is frozen at this gate, but the evidence it produces feeds the alpha site decision and the export classification.
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