Closes MEMS Process Development before its gate by checking exit criteria, work products, quality checks, decisions and hand-offs. The process Integration Engineer runs it.
MustThe process runs end to end with film stress, etch profile, release and seal inside their windows.
MustMEMS design rules and the checking deck are released.
MustProcess control monitor structures are placed on the mask set.
MustThe transducer layout database is checked against the rules, clean or waived with the process owner.
MustLayout-to-model checks confirm that the released layout matches what was simulated.
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