Term · Lithography & Materials
Stochastic defect
A random local patterning failure, such as a missing contact, a broken line or a microbridge, caused by photon shot noise and the discrete distribution of resist molecules rather than by any systematic error.
- Also known as
- Stochastics
- Type
- Term
- Domain
- Lithography & Materials, Photoresist
Notes
Because the failure rate must be below one in a billion features, stochastics are measured by massive e-beam inspection.
Related terms
Part of the Lithography & Materials glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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Used on 3 pages of the Hub. In each group, the pages that mention it most come first.
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