Standard · Standards & Organisations
SEMI E87
The SEMI specification for carrier management, which defines how equipment and the factory host track and control wafer carriers at load ports.
- Type
- Standard
- Domain
- Standards & Organisations, Fab, packaging & assembly
Related terms
Part of the Standards & Organisations glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
No other page of the Hub uses this term yet.
Suggest an improvement
Suggest an improvement to this entry
A clearer definition, an example, a correction or a source an editor can check. Editors review every suggestion before the entry changes.
Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary