Metric · Fab Ops, Yield & Metrology
Scope 1 emissions
Greenhouse gas emissions released directly by a fab's own operations, dominated in semiconductors by fluorinated process gases and heat transfer fluids that escape abatement.
- Also known as
- Direct emissions
- Type
- Metric
- Domain
- Fab Ops, Yield & Metrology, Sustainability and resources
Notes
Defined by the GHG Protocol; unusual for the industry in that process chemistry, not fuel burning, is the main source.
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