Component · Photonics, MEMS & Sensors
MEMS pressure sensor
A sensor in which pressure deflects a thin micromachined silicon diaphragm, read out either by piezoresistors in the diaphragm or by capacitance to a fixed electrode.
Variants measure absolute, gauge or differential pressure.
- Also known as
- Pressure sensor, Barometric sensor
- Type
- Component
- Domain
- Photonics, MEMS & Sensors, MEMS
Notes
Used for tyre pressure monitoring, manifold air pressure, barometric altitude in phones, and medical and industrial gauges.
Related terms
- MEMS
- Bulk micromachining
- Piezoresistive effect
- TPMS
Part of the Photonics, MEMS & Sensors glossary, with every term in the topic and the lifecycles, tools and standards that use them.
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