Material · Policy, Trade & Geopolitics
F-GHG (Fluorinated greenhouse gas)
High global warming potential gases such as NF3, SF6 and various perfluorocarbons used in etch and chamber cleaning, abated at the tool exhaust to reduce a fab's direct emissions.
- Also known as
- PFC emissions
- Type
- Material
- Domain
- Policy, Trade & Geopolitics, Sustainability and ESG
Notes
A dominant share of a fab's Scope 1 footprint, which is why point-of-use abatement efficiency is tracked closely.
Related terms
Part of the Policy, Trade & Geopolitics glossary, with every term in the topic and the lifecycles, tools and standards that use them.
Where it appears on the Hub
Used on 2 pages of the Hub. In each group, the pages that mention it most come first.
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Last reviewed: not yet reviewed in depth. Entry last updated . The full glossary