Events / Global directory / EUV Source Workshop

EUV Source Workshop

Tier 3: niche / regionalSymposium / WorkshopLithography

Usual timing

Normally held in June/November. No confirmed next-edition date yet.

Organizer: EUV Litho, Inc.
Cadence: Annual
Usual host: Rotating, Rotating
Venue: —
Format: In-person
Scale: <500
Audience: EUV source physicists and plasma/laser engineers
Website: www.euvlitho.com/

Notes

Specialist workshop on EUV light source physics, LPP tin plasma, collector lifetime and source power scaling.

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